I’m trying to simulate the deposition from a titanium vacuum arc source, which generates particles with a 76eV average energy. To do particle wall interactions correctly I would need to have the particle and energy reflection coefficients as a function of particle energy and angle of incidence. Also a custom reflection angular distribution. Is it possible to easily add this to molflow as an input file? Right now I’m trying to do some averaging over particle energies and angles, but it is probably simplifying things too much to capture the physics. Maybe there is a better ray tracing program that allows for custom physics.
Best,
Alan